PQC Status - Istituto Nazionale di Fisica Nucleare
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Transcript PQC Status - Istituto Nazionale di Fisica Nucleare
Status of PQC
Florence, Strasbourg, Vienna
Carlo Civinini
INFN-Firenze
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Introduction
Status of hw + sw
Status of DataBase
Batch qualifications
STM
HPK
Open points
rAlu
VFB limit
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Status of DB
The new version of PCQ acquisition program is able to write an XML file
compatible with the last version of BigBrowser.
Up to now we have inserted 20 measurements into the Tracker DataBase.
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Status of hw + hs
HW is OK, some improvements can be done on the probe cards
presently used (cleaning or better HV insulation)
SW is OK, production version is working
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Logistic
• Florence:
IB1, IB2, OB1, OB2 (no-longtime IV)
from QTC Perugia and Pisa
5% of the wafers = 693 standard moons
• Strasbourg:
W3, W5A, W5b, W6a, W6b
from QTC Karlsruhe
271 standard moons
• Vienna:
W1, W2, W4, W7A, W7b
from QTC Vienna
235 standard moons
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Batch Qualification
Measurements done since last CMS week:
-STM sets: PG3 PI23 PI25 PI31 PI38 PI26 PI32 KAS2 PI24 PI33 PI49
Florence
OB1 OB2
Strasbourg
OB2 W6A
-HPK sets: PG01 PG02 PI42 PI43 KAH1 VI01 VI02
Strasbourg
W3
Florence
IB1 IB2
Vienna
W4 W2
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Vienna
OB2
2
30 20
2 1
30 20 26
2 1 1
30 20 26 06
2 1 1 4
30 20 26 06 01
2 1 1 4
30 20 26 06 02
2 2 1 4
30 20 26 06 03
2 2 1 4
30 20 26 06 04
2 2 1 5
30 20 26 06 01
2 2 1 5
30 20 26 06 02
2 1 1 5
30 20 26 06 03
2 1 1 5
30 20 26 24 04
2 1 1 0
30 20 26 24 38
2 1 1 0
30 20 26 24 39
2 1 1 0
30 20 26 24 40
2 1 1 0
30 20 26 24 41
2 1 1 1
30 20 26 24 66
2 1 1 1
30 20 26 24 67
2 2 1 1
30 20 26 24 68
2 2 1 1
30 20 26 24 71
2 2 1 2
30 20 26 24 34
2 2 1 2
30 20 26 24 36
2 2 1 2
30 20 26 24 37
2 2 1 2
30 20 26 24 38
2 7 1 3
30 20 22 24 64
2 7 0 3
30 20 22 00 67
2 7 0 1
30 20 22 00 09
2 7 0 1
30 20 22 00 10
2 7 0 1
30 20 22 00 11
2 8 0 1
30 20 22 00 12
2 8 0 2
30 20 22 00 03
2 8 0 1
30 20 22 00 02
2 8 0 1
30 20 22 00 05
2 8 0 1
30 20 22 00 08
2 8 0 1
30 20 22 00 17
2 8 0 1
30 20 22 00 29
2 8 0 2
30 20 22 00 04
2 6 0 2
30 20 21 00 11
2 6 6 2
30 20 21 00 17
22 62 60 10
06 16 01 4
21 00 08
60 11
01 7
19
30
V breakdown (V)
V_break >120
V
HPK IV-diel
IV diel on TS-CAP
200
180
160
140
120
100
80
60
40
20
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
2
30 20
2 1
30 20 26
2 1 1
30 20 26 06
2 1 1 4
30 20 26 06 01
2 1 1 4
30 20 26 06 02
2 2 1 4
30 20 26 06 03
2 2 1 4
30 20 26 06 04
2 2 1 5
30 20 26 06 01
2 2 1 5
30 20 26 06 02
2 1 1 5
30 20 26 06 03
2 1 1 5
30 20 26 24 04
2 1 1 0
30 20 26 24 38
2 1 1 0
30 20 26 24 39
2 1 1 0
30 20 26 24 40
2 1 1 0
30 20 26 24 41
2 1 1 1
30 20 26 24 66
2 1 1 1
30 20 26 24 67
2 2 1 1
30 20 26 24 68
2 2 1 1
30 20 26 24 71
2 2 1 2
30 20 26 24 34
2 2 1 2
30 20 26 24 36
2 2 1 2
30 20 26 24 37
2 2 1 2
30 20 26 24 38
2 7 1 3
30 20 22 24 64
2 7 0 3
30 20 22 00 67
2 7 0 1
30 20 22 00 09
2 7 0 1
30 20 22 00 10
2 7 0 1
30 20 22 00 11
2 8 0 1
30 20 22 00 12
2 8 0 2
30 20 22 00 03
2 8 0 1
30 20 22 00 02
2 8 0 1
30 20 22 00 05
2 8 0 1
30 20 22 00 08
2 8 0 1
30 20 22 00 17
2 8 0 1
30 20 22 00 29
2 8 0 2
30 20 22 00 04
2 6 0 2
30 20 21 00 11
2 6 6 2
30 20 21 00 17
22 62 60 10
06 16 01 4
21 00 08
60 11
01 7
19
30
Cac (pF)
30
HPK Cac
Cac > 18 pF
Cac on TS-CAP
25
20
15
10
5
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
2
30 20
2 1
30 20 26
2 1 1
30 20 26 06
2 1 1 4
30 20 26 06 01
2 1 1 4
30 20 26 06 02
2 2 1 4
30 20 26 06 03
2 2 1 4
30 20 26 06 04
2 2 1 5
30 20 26 06 01
2 2 1 5
30 20 26 06 02
2 1 1 5
30 20 26 06 03
2 1 1 5
30 20 26 24 04
2 1 1 0
30 20 26 24 38
2 1 1 0
30 20 26 24 39
2 1 1 0
30 20 26 24 40
2 1 1 0
30 20 26 24 41
2 1 1 1
30 20 26 24 66
2 1 1 1
30 20 26 24 67
2 2 1 1
30 20 26 24 68
2 2 1 1
30 20 26 24 71
2 2 1 2
30 20 26 24 34
2 2 1 2
30 20 26 24 36
2 2 1 2
30 20 26 24 37
2 2 1 2
30 20 26 24 38
2 7 1 3
30 20 22 24 64
2 7 0 3
30 20 22 00 67
2 7 0 1
30 20 22 00 09
2 7 0 1
30 20 22 00 10
2 7 0 1
30 20 22 00 11
2 8 0 1
30 20 22 00 12
2 8 0 2
30 20 22 00 03
2 8 0 1
30 20 22 00 02
2 8 0 1
30 20 22 00 05
2 8 0 1
30 20 22 00 08
2 8 0 1
30 20 22 00 17
2 8 0 1
30 20 22 00 29
2 8 0 2
30 20 22 00 04
2 6 0 2
30 20 21 00 11
2 6 6 2
30 20 21 00 17
22 62 60 10
06 16 01 4
21 00 08
60 11
01 7
19
V_fb (V)
HPK Vfb
MOS MTL
3
V_fb <3 V
2.5
2
1.5
1
0.5
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
2
30 201
2 2
30 201 612
22 26 40
30 01 12 38
2 26 40
30 201 12 39
2 2 40
30 201 612 40
2 2 4
30 201 612 041
22 26 41
30 01 12 66
2 26 4
30 201 12 167
2 2 41
30 202 612 68
22 26 41
30 02 12 71
2 26 42
30 202 12 34
2 2 42
30 202 612 36
2 2 4
30 202 612 237
22 26 42
30 02 12 38
2 26 43
30 207 12 64
2 2 43
30 207 200 67
22 22 01
30 07 00 09
2 22 01
30 207 00 10
2 2 01
30 207 200 11
2 2 0
30 208 200 112
22 22 02
30 08 00 03
2 22 0
30 208 00 102
2 2 01
30 208 200 05
22 22 01
30 08 00 08
2 22 01
30 208 00 17
2 2 01
30 208 200 29
2 2 0
30 208 200 204
22 22 02
30 06 00 11
2 21 02
30 206 60 17
2 2 01
30 206 160 04
22 21 01
06 60 08
21 01
60 17
01
19
30
V_depl [V]
HPK Vdepl
CV on DIode
160
100 < V_depl < 250 V
150
140
130
120
110
100
90
80
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
2
30 201
2 2
30 201 610
2 2 6
30 201 610 401
2 2 6
30 201 610 402
2 2 6
30 202 610 403
2 2 6
30 202 610 404
2 2 6
30 202 610 501
2 2 6
30 202 610 502
2 2 6
30 201 610 503
2 2 6
30 201 612 504
2 2 4
30 201 612 038
2 2 4
30 201 612 039
2 2 4
30 201 612 040
2 2 4
30 201 612 041
2 2 4
30 201 612 166
2 2 4
30 201 612 167
2 2 4
30 202 612 168
2 2 4
30 202 612 171
2 2 4
30 202 612 234
2 2 4
30 202 612 236
2 2 4
30 202 612 237
2 2 4
30 202 612 238
2 2 4
30 207 612 364
2 2 4
30 207 200 367
2 2 0
30 207 200 109
2 2 0
30 207 200 110
2 2 0
30 207 200 111
2 2 0
30 208 200 112
2 2 0
30 208 200 203
2 2 0
30 208 200 102
2 2 0
30 208 200 105
2 2 0
30 208 200 108
2 2 0
30 208 200 117
2 2 0
30 208 200 129
2 2 0
30 208 200 204
2 2 0
30 206 200 211
2 2 0
30 206 160 217
2 2 0
30 206 160 104
22 21 01
06 60 08
21 01
60 17
01
19
30
rho_alu [mOhm/sq.]
Aluminum Resistivity from Sheet
HPK rAlu
40.00
10 < rho_alu < 30 mOhm/sq
35.00
30.00
25.00
20.00
15.00
10.00
5.00
0.00
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
21
0
30 41
21 47
3
0
30 42 94
21 02 08
7
0
30 42 57
21 02 19
7
0
30 42 57
21 03 24
8
0
30 42 29
21 03 09
8
0
30 42 29
21 03 18
8
0
30 42 28
21 03 25
8
0
30 42 31
21 03 03
8
0
30 42 31
21 03 16
8
0
30 42 31
21 03 35
8
0
30 42 31
21 02 46
7
0
30 42 83
21 02 36
7
0
30 42 93
21 02 05
7
0
30 42 93
3
0
21
27 3
0
30 42 83
21 02 01
7
1
30 11 83
21 46 46
2
1
30 11 77
1
4
21
62 3
1
30 11 77
21 47 15
3
1
30 12 52
21 10 22
5
1
30 12 26
0
1
21
05 3
0
30 41 26
21 50 15
6
0
30 41 15
21 50 12
6
0
30 41 15
18
5
21
0
04 61
30
5
2
21 09 20
04 42
30
3
2
21 09 14
4
0
30 42 23
21 11 19
7
0
30 42 40
21 11 01
7
0
30 42 40
21 11 10
04 74
21 01
17 2
40
25
STM IV-diel
V_break >120 V
IV diel on TS-CAP
205
200
195
190
185
180
175
170
V_break
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
21
0
30 41
21 47
3
0
30 42 94
21 02 08
7
0
30 42 57
21 02 19
7
0
30 42 57
21 03 24
8
0
30 42 29
21 03 09
8
0
30 42 29
21 03 18
8
0
30 42 28
21 03 25
8
0
30 42 31
21 03 03
8
0
30 42 31
21 03 16
8
0
30 42 31
21 03 35
8
0
30 42 31
21 02 46
7
0
30 42 83
21 02 36
7
0
30 42 93
21 02 05
7
0
30 42 93
3
0
21
27 3
0
30 42 83
21 02 01
7
1
30 11 83
21 46 46
2
1
30 11 77
1
4
21
62 3
1
30 11 77
21 47 15
3
1
30 12 52
21 10 22
5
1
30 12 26
0
1
21
05 3
0
30 41 26
21 50 15
6
0
30 41 15
21 50 12
6
0
30 41 15
18
5
21
0
04 61
30
5
2
21 09 20
04 42
30
3
2
21 09 14
4
0
30 42 23
21 11 19
7
0
30 42 40
21 11 01
7
0
30 42 40
21 11 10
04 74
21 01
17 2
40
25
STM Cac
Cac > 16 pF
Cac on TS-CAP
20
18
16
14
12
10
8
6
4
2
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
21
0
30 41
21 47
3
30 042 94
21 02 08
7
0
30 42 57
21 02 19
7
30 042 57
21 03 24
30 042 829
21 03 09
8
0
30 42 29
21 03 18
8
30 042 28
21 03 25
8
0
30 42 31
21 03 03
8
30 042 31
21 03 16
8
0
30 42 31
21 03 35
8
30 042 31
21 02 46
7
0
30 42 83
21 02 36
7
30 042 93
21 02 05
7
0
30 42 93
21 02 33
7
30 042 83
21 02 01
30 111 783
21 46 46
2
1
30 11 77
21 46 13
2
30 111 77
21 47 15
3
1
30 12 52
21 10 22
5
30 112 26
21 10 03
5
0
30 41 26
21 50 15
6
30 041 15
21 50 12
6
0
30 41 15
21 50 18
6
30 042 15
21 09 20
30 042 423
21 09 14
4
0
30 42 23
21 11 19
7
30 042 40
21 11 01
7
0
30 42 40
21 11 10
04 74
21 01
17 2
40
25
V_fb [V]
STM Vfb
|V_fb| <7 V (still to assign final limit)
MOS MTL
9
8
7
6
5
4
3
2
1
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
21
0
30 41
21 47
3
30 042 94
21 02 08
7
0
30 42 57
21 02 19
7
30 042 57
21 03 24
8
30 042 29
21 03 09
8
0
30 42 29
21 03 18
8
30 042 28
21 03 25
8
0
30 42 31
21 03 03
8
30 042 31
21 03 16
8
0
30 42 31
21 03 35
8
30 042 31
21 02 46
7
0
30 42 83
21 02 36
7
30 042 93
21 02 05
7
0
30 42 93
21 02 33
7
30 042 83
21 02 01
7
30 111 83
21 46 46
2
1
30 11 77
21 46 13
2
30 111 77
21 47 15
3
1
30 12 52
21 10 22
5
30 112 26
21 10 03
5
0
30 41 26
21 50 15
6
30 041 15
21 50 12
6
0
30 41 15
21 50 18
6
30 042 15
21 09 20
4
30 042 23
21 09 14
4
0
30 42 23
21 11 19
7
30 042 40
21 11 01
7
0
30 42 40
21 11 10
04 74
21 01
17 2
40
25
V_depl [V]
STM Vdepl
100 < V_depl < 260 V
CV on DIode
250
200
150
100
50
0
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
30
21
0
30 414
21
73
0
9
30 420 40
21
27 8
0
5
30 420 71
21
27 9
0
5
30 420 724
21
38
0
2
30 420 90
21
38 9
0
2
30 420 91
21
38 8
0
2
30 420 82
21
38 5
0
3
30 420 10
21
38 3
0
3
30 420 116
21
38
0
3
30 420 13
21
38 5
0
3
30 420 14
21
27 6
0
8
30 420 33
21
27 6
0
9
30 420 30
21
27 5
0
9
30 420 333
21
27
0
8
30 420 30
21
27 1
1
8
30 114 34
21
62 6
1
7
30 114 71
21
62 3
1
7
30 114 71
21
73 5
1
5
30 121 22
21
05 2
1
2
30 121 60
21
05 3
0
2
30 415 615
21
06
0
1
30 415 51
21
06 2
0
1
30 415 51
21
06 8
0
1
30 420 52
21
94 0
0
2
30 420 31
21
94 4
0
2
30 421 319
21
17
0
4
30 421 00
21
17 1
0
4
30 421 01
21
17 0
04
4
21 012
17
40
25
rho_alu [mOhm/sq.]
STM rAlu
10 < rho_alu < 30 mOhm/sq
Aluminum Resistivity from Sheet
40.00
35.00
30.00
25.00
20.00
15.00
10.00
5.00
0.00
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Batch evaluation
HPK sets: PG01 PG02 PI42 PI43 Measurements OK, accepted
beginning of July (rAlu is marginal)
STM sets: PG3 PI23 PI25 PI31 PI38 PI26 PI32 KAS2 PI24 PI33 PI49
HPK sets: KAH1 VI01 VI02
Most of the measurements are OK,
not yet officially accepted
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002
Open points
rAlu measurements are ‘marginal’ both in HPK and STM.
STM says that the metallized strip used to evaluate the aluminum
resistivity is 10% narrower than the nominal (9mm instead of 10mm
because of underetching).
Once verified this leads to a decrease of 10% of rAlu.
VFB limits are still to be fixed according to the irradiation results.
Detector with VFB=10V seems to be OK after irradiation but we
would like to see more data at higher VFB (for example 14V)
before setting this limit.
Carlo Civinini, Status of PQC, Sensor Meeting, 17th Jul 2002